{"id":9924,"date":"2020-03-24T10:08:23","date_gmt":"2020-03-24T02:08:23","guid":{"rendered":"https:\/\/ljdevice.com.tw\/%e5%a4%a7%e9%9d%a2%e7%a9%8d%e5%96%ae%e6%99%b6%e6%8a%80%e8%a1%93%e5%a4%a7%e7%aa%81%e7%a0%b4%ef%bc%8c%e5%8f%b0%e7%a9%8d%e9%9b%bb%e8%88%87%e4%ba%a4%e5%a4%a7%e7%99%bb%e4%b8%8a%e5%9c%8b%e9%9a%9b%e9%a0%82\/"},"modified":"2020-09-16T11:25:10","modified_gmt":"2020-09-16T03:25:10","slug":"%e5%a4%a7%e9%9d%a2%e7%a9%8d%e5%96%ae%e6%99%b6%e6%8a%80%e8%a1%93%e5%a4%a7%e7%aa%81%e7%a0%b4%ef%bc%8c%e5%8f%b0%e7%a9%8d%e9%9b%bb%e8%88%87%e4%ba%a4%e5%a4%a7%e7%99%bb%e4%b8%8a%e5%9c%8b%e9%9a%9b%e9%a0%82","status":"publish","type":"post","link":"https:\/\/ljdevice.com.tw\/en\/%e5%a4%a7%e9%9d%a2%e7%a9%8d%e5%96%ae%e6%99%b6%e6%8a%80%e8%a1%93%e5%a4%a7%e7%aa%81%e7%a0%b4%ef%bc%8c%e5%8f%b0%e7%a9%8d%e9%9b%bb%e8%88%87%e4%ba%a4%e5%a4%a7%e7%99%bb%e4%b8%8a%e5%9c%8b%e9%9a%9b%e9%a0%82\/","title":{"rendered":"Wafer-scale single-crystal hexagonal boron nitride monolayers on Cu (111)"},"content":{"rendered":"<p>Nature volume 579, pages219\u2013223(2020)Cite this article<\/p>\n<p><span class=\"body\"><span class=\"head\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-9921\" src=\"https:\/\/ljdevice.com.tw\/wp-content\/uploads\/2020\/03\/\u6676\u5713\u5c3a\u5bf8\u7684\u516d\u65b9\u6c2e\u5316\u787c\u6210\u9577\u6280\u8853\u7a81\u7834\u53f0\u7a4d\u96fb\u63d0\u4f9b-624x378-300x182.jpg\" alt=\"\" width=\"300\" height=\"182\" srcset=\"https:\/\/ljdevice.com.tw\/wp-content\/uploads\/2020\/03\/\u6676\u5713\u5c3a\u5bf8\u7684\u516d\u65b9\u6c2e\u5316\u787c\u6210\u9577\u6280\u8853\u7a81\u7834\u53f0\u7a4d\u96fb\u63d0\u4f9b-624x378-300x182.jpg 300w, https:\/\/ljdevice.com.tw\/wp-content\/uploads\/2020\/03\/\u6676\u5713\u5c3a\u5bf8\u7684\u516d\u65b9\u6c2e\u5316\u787c\u6210\u9577\u6280\u8853\u7a81\u7834\u53f0\u7a4d\u96fb\u63d0\u4f9b-624x378-450x273.jpg 450w, https:\/\/ljdevice.com.tw\/wp-content\/uploads\/2020\/03\/\u6676\u5713\u5c3a\u5bf8\u7684\u516d\u65b9\u6c2e\u5316\u787c\u6210\u9577\u6280\u8853\u7a81\u7834\u53f0\u7a4d\u96fb\u63d0\u4f9b-624x378.jpg 624w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/span><\/span><\/p>\n<p><!--more--><\/p>\n<p>Ultrathin two-dimensional (2D) semiconducting layered materials offer great potential for extending Moore\u2019s law of the number of transistors in an integrated circuit<sup><a id=\"ref-link-section-d46240e636\" title=\"Li, M.-Y., Su, S.-K., Wong, H.-S. P. &amp; Li, L.-J. How 2D semiconductors could extend Moore\u2019s law. Nature 567, 169\u2013170 (2019).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR1\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">1<\/a><\/sup>. One key challenge with 2D semiconductors is to avoid the formation of charge scattering and trap sites from adjacent dielectrics. An insulating van der Waals layer of hexagonal boron nitride (hBN) provides an excellent interface dielectric, efficiently reducing charge scattering<sup><a id=\"ref-link-section-d46240e640\" title=\"Novoselov, K. S., Mishchenko, A., Carvalho, A. &amp; Neto, A. H. C. 2D materials and van der Waals heterostructures. Science 353, aac9439 (2016).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR2\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">2<\/a>,<a id=\"ref-link-section-d46240e643\" title=\"Dean, C. R. et al. Boron nitride substrates for high-quality graphene electronics. Nat. Nanotechnol. 5, 722\u2013726 (2010).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR3\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">3<\/a><\/sup>. Recent studies have shown the growth of single-crystal hBN films on molten gold surfaces<sup><a id=\"ref-link-section-d46240e647\" title=\"Lee, J. S. et al. Wafer-scale single-crystal hexagonal boron nitride film via self-collimated grain formation. Science 362, 817\u2013821 (2018).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR4\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">4<\/a><\/sup> or bulk copper foils<sup><a id=\"ref-link-section-d46240e651\" title=\"Wang, L. et al. Epitaxial growth of a 100-square-centimetre single-crystal hexagonal boron nitride monolayer on copper. Nature 570, 91\u201395 (2019).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR5\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">5<\/a><\/sup>. However, the use of molten gold is not favoured by industry, owing to its high cost, cross-contamination and potential issues of process control and scalability. Copper foils might be suitable for roll-to-roll processes, but are unlikely to be compatible with advanced microelectronic fabrication on wafers. Thus, a reliable way of growing single-crystal hBN films directly on wafers would contribute to the broad adoption of 2D layered materials in industry. Previous attempts to grow hBN monolayers on Cu\u00a0(111) metals have failed to achieve mono-orientation, resulting in unwanted grain boundaries when the layers merge into films<sup><a id=\"ref-link-section-d46240e655\" title=\"Uchida, Y., Iwaizako, T., Mizuno, S., Tsuji, M. &amp; Ago, H. Epitaxial chemical vapour deposition growth of monolayer hexagonal boron nitride on a Cu (111)\/sapphire substrate. Phys. Chem. Chem. Phys. 19, 8230\u20138235 (2017).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR6\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">6<\/a>,<a id=\"ref-link-section-d46240e658\" title=\"Song, X. et al. Chemical vapor deposition growth of large-scale hexagonal boron nitride with controllable orientation. Nano Res. 8, 3164\u20133176 (2015).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR7\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">7<\/a><\/sup>. Growing single-crystal hBN on such high-symmetry surface planes as Cu\u00a0(111)<sup><a id=\"ref-link-section-d46240e663\" title=\"Wang, L. et al. Epitaxial growth of a 100-square-centimetre single-crystal hexagonal boron nitride monolayer on copper. Nature 570, 91\u201395 (2019).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR5\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">5<\/a>,<a id=\"ref-link-section-d46240e666\" title=\"Li, J. et al. Growth of polar hexagonal boron nitride monolayer on nonpolar copper with unique orientation. Small 12, 3645\u20133650 (2016).\" href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2#ref-CR8\" data-test=\"citation-ref\" data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\">8<\/a><\/sup> is widely believed to be impossible, even in theory. Nonetheless, here we report the successful epitaxial growth of single-crystal hBN monolayers on a Cu\u00a0(111) thin film across a two-inch <i>c<\/i>-plane sapphire wafer. This surprising result is corroborated by our first-principles calculations, suggesting that the epitaxial growth is enhanced by lateral docking of hBN to Cu\u00a0(111) steps, ensuring the mono-orientation of hBN monolayers. The obtained single-crystal hBN, incorporated as an interface layer between molybdenum disulfide and hafnium dioxide in a bottom-gate configuration, enhanced the electrical performance of transistors. This reliable approach to producing wafer-scale single-crystal hBN paves the way to future 2D electronics.<\/p>\n<p>Source:<a href=\"https:\/\/www.nature.com\/articles\/s41586-020-2009-2\">https:\/\/www.nature.com\/articles\/s41586-020-2009-2<\/a><\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Nature volume 579, pages219\u2013223(2020)Cite this article<\/p>\n","protected":false},"author":7,"featured_media":9921,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[609],"tags":[],"class_list":["post-9924","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industrial-news"],"_links":{"self":[{"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/posts\/9924","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/comments?post=9924"}],"version-history":[{"count":2,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/posts\/9924\/revisions"}],"predecessor-version":[{"id":9927,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/posts\/9924\/revisions\/9927"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/media\/9921"}],"wp:attachment":[{"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/media?parent=9924"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/categories?post=9924"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/ljdevice.com.tw\/en\/wp-json\/wp\/v2\/tags?post=9924"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}